Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications

Jizhou Zhou, Mario De Miguel-Ramos, Luis Garcia-Gancedo, Enrique Iborra, Jimena Olivares, Hao Jin, Jikui Luo, Ahmed Elhady, Sean Dong, D. M. Wang, Yong Qing Fu

Research output: Contribution to journalArticlepeer-review

39 Citations (Scopus)

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