DLC/TiNi microcage for biopsy applications

Y. Q. Fu*, J. K. Luo, S. E. Ong, S. Zhang, A. J. Flewitt, W. I. Milne

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A TiNi/diamond-like-carbon (DLC) microcage for biological application has been designed, fabricated and characterized. A compressively stressed DLC film with TiNi pattern on top lifts the fingers upwards once they are released from the substrate, and the microcage can be closed through shape memory effect of top TiNi film with temperature below 80°C. Further heating above 100°C, the gradual opening of the microcage can be obtained due to thermal bimorph effect. The biocompatibility of both the TiNi and DLC films has been proved using a cell-culture method.

Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS III
Publication statusPublished - 23 Nov 2007
Externally publishedYes
EventSmart Sensors, Actuators, and MEMS III - Maspalomas, Gran Canaria, Spain
Duration: 2 May 20074 May 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceSmart Sensors, Actuators, and MEMS III
CityMaspalomas, Gran Canaria


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