Effect of sputtering target power density on topography and residual stress during growth of nanocomposite nc-TiN/a-SiNx thin films

Sam Zhang, Deen Sun, Yong Qing Fu, Hejun Du, Qing Zhang

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of sputtering target power density on topography and residual stress during growth of nanocomposite nc-TiN/a-SiNx thin films'. Together they form a unique fingerprint.

Material Science

Engineering

Physics