Fabrication of micromachined TiNi-based microgripper with complaint structure

Yong Qing Fu, Hejun Du

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.
Original languageEnglish
Pages (from-to)38-47
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 25 Apr 2003


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