FIB Etching for Photonic Device Applications

Martin J. Cryan, Y-L. Daniel Ho, Pavel S. Ivanov, Peter J. Heard, Judy Rorison, John G. Rarity

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationNanofabrication Using Focused Ion and Electron Beams
Subtitle of host publicationPrinciples and Applications
Editors Ivo Utke, Stanislav Moshkalev, Phillip E. Russell
Place of PublicationNew York
PublisherOxford University Press
Number of pages31
ISBN (Print)9780199734214, 0199734216
Publication statusPublished - 24 May 2012
Externally publishedYes

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