Graphene/LiNbO3 surface acoustic wave device based relative humidity sensor

Yuanjun Guo, Jia Zhang, Chao Zhao, Ping An Hu, Xiao-Tao Zu, Yong Qing Fu

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)


This study described relative humidity (RH) sensing using a graphene/128° YX LiNbO3 surface acoustic wave (SAW) device. The resonant frequency of the device decreased in a two-stage manner as the RH increased. For a low RH range (RH <50%), a frequency downshift of 1.38 kHz per 1% RH change was observed. This was attributed to mass loading of the SAW propagation surface due to the adsorption of water molecules by the graphene surface. For a high RH range (RH > 50%), a frequency downshift of 2.6 kHz per 1% RH change was obtained, which was due to the change in elastic grapheme properties. The mass loading effect of the water layer was less effective at high temperature, resulting in a lower temperature coefficient of resonant frequency (TCF).
Original languageEnglish
Pages (from-to)5800-5802
JournalOptik - International Journal for Light and Electron Optics
Issue number19
Publication statusPublished - Oct 2014


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