A novel laser-fibre system is used for in-situ stress monitoring of thin film deposition on a glass substrate. The authors have shown that it could also be used to monitor the temperature of the substrate, as well as the thickness of the growing layer, using the thin film interference equation. Single layers of ZnS and YF3 optical coatings have been evaporated onto borosilicate glass, doped with cerium oxide, in the environment of a high vacuum (HV) chamber. The results obtained show that the novel laser-fibre system used as a stress monitor can give insights into the causes of thin film residual stress in vacuum evaporation.
|Advanced Engineering Materials
|Published - Aug 2002